Doonta Nadiifinta Wafer Quartz
Doonta nadiifinta wafer ee quartz waa qalab loo isticmaalo nadiifinta wafer ee habka wax soo saarka semiconductor.
Qalabka: 99.99% quartz
Sharaxaad
Astaamaha
- Iska caabbinta heerkulka sare
- Iska caabbinta daxalka
- Xiro iska caabin
- Fudud in la nadiifiyo
Isticmaal: ka saar wasakhowga dusha sare
Hubi tayada wax soo saarka ee chips semiconductor.
Codsiga
1. Kahor{1}Nadiifinta Faafinta
Waxaa loo isticmaalaa in lagu qaado maraqyada iyada oo loo marayo kursiga qoyan ama tillaabooyinka nadiifinta immersion (tusaale, nadiifinta RCA) si meesha looga saaro wasakhda organic, macdan, iyo qayb ka hor intaanay sare - heerkulka heerkulka ama hababka oksaydhka.
2. Boostada -CMP (Qorshaynta Farsamaynta Kiimikada) Nadiifinta
Waxay xajiyaa maraqyada inta lagu jiro boostada{0} nadiifinta nadiifinta si loo baabi'iyo hadhaaga slurry iyo cilladaha dusha sare, hubinta fiicnaanshaha ugu fiican ee talaabooyinka lithography ee xiga.
3. Hore -Dhammaadka- ee-Qalabka (FEOL)
Ka shaqeeya marxaladaha nadiifinta ee muhiimka ah ee FEOL halkaasoo sagxadaha ultra{0}ka nadiifka ah looga baahan yahay korriinka gate oxide, dhigista epitaxial, ama ion implantation.
4. Dib-Dhammaadka--Laadka (BEOL) Processing
Waxay taageertaa waferrada inta lagu jiro boostada{{0}etch ama post{1}} nadiifinta meelaynta si meesha looga saaro sawir-qaadista, etch byproducts, iyo wasakhyada birta ah kadib samaynta isku xidhka.
5. Baakaynta Sare
Waxay sahlaysa wafer{0}} nadiifinta heerka ka hor inta aan la dilin ama ku xidhin 2.5D/3D IC, hubinta wasakhda{3}} is dhex galka bilaashka ah ee isku xidhka la isku halayn karo.
6. Wax-soo-saarka sawir-qaadista
Loo isticmaalo soosaarka unugyada cadceedda si loo nadiifiyo substrates silikoon, kor u qaadista tayada dusha sare ee nuugista iftiinka iyo hufnaanta beddelka tamarta.
Guryaha
|
Guryaha Jirka |
Qiimaha |
|
daahirnimo |
＞99.99% |
|
Cufnaanta |
2.2g/cm3 |
|
Hufnaan |
＞90% |
|
Mohs Hardness |
5.5--6.5 |
|
Barta qallafsanaanta |
1280 darajo |
|
Barta Jilicsan |
1750 darajo |
|
Barta Annealing |
1250 darajo |
|
Kuleylka Gaarka ah (20 - 350 darajo) |
670J/kg. shahaado |
|
Habdhaqanka Kulaylka (20 darajo) |
1.4W/m shahaado |
|
Samaynta kulaylka (w/mk, 1000 darajo) |
1.0-1.2 |
|
Tusmada Dib-u-celinta |
1.4585 |
|
Isku-dhafka Balaadhinta kulaylka |
5.510 -7cm/cm. shahaado |
|
Kulul - Heerkulka shaqada |
1750--2050 darajo |
|
Heerkulka adeega muddada gaaban - |
1450 darajo |
|
Heerkulka adeega muddada dheer - |
1100 darajo |
|
Guryaha Kiimikada |
Qiimaha |
|
Acid u adkaysata |
Acid xoog leh (marka laga reebo HF), alkali xoog leh, xal organic |
|
Heerkulka sare U adkaysta daxalka |
Aad u fiican |
|
Waxyaabaha ka kooban wasakhda birta |
5 ppm |
|
Guryaha Korontada |
Qiimaha |
|
iska caabin |
7107Ω.cm |
|
Xoogga dahaarka |
250 ~ 400Kv/cm |
|
Dielectric Constant |
3.7~3.9 |
|
Iskuxidhka Nuugista Dielectric |
＜410-4 |
|
Isku-dhafka Khasaaraha Dielectric |
＜110-4 |
|
Guryaha Makaanikada |
Qiimaha |
|
Xoog cadaadis leh |
1100MPa |
|
Xoog Laabashada |
67MPa |
|
Xoogga Jilicsan |
48MPa |
|
Saamiga Poisson |
0.14~0.17 |
|
Modulka dhalinyarada |
72000MPa |
|
Modul jeex |
31000MPa |
Hababka nadiifinta
Nadiifinta quusitaanka:
Ku rid waferka doonta nadiifinta, ka dibna ku dhex geli doonta nadiifinta dareeraha nadiifinta, oo kordhi xidhiidhka ka dhexeeya dareeraha nadiifinta iyo dusha sare ee wafer adigoo kor u qaadaya doonnida wafer si loo hagaajiyo saamaynta nadiifinta.
Nadiifinta buufinta:
U istaag doonta nadiifinta si toos ah qolka buufinta, oo isticmaal birta si aad ugu buufiso dareeraha nadiifinta dusha sare ee wafer si aad uga saarto wasakhda. ;
Muhiimadda nadiifinta doomaha:
- Hubi nadaafadda waferka: dusha sare ee wafer-ka nadiifka ah ayaa muhiim u ah tayada wax soo saarka ee chips-ka semiconductor, doonta nadiifinta ayaa door muhiim ah ka ciyaarta habka nadiifinta.
- Hubi isku halaynta jajabyada semiconductor: Hubi isku halaynta jajabyada oo yareeya cilladaha alaabta adigoo ka saaraya wasakhowga dusha sare.
- Hagaajinta wax-soo-saarka chips-ka semiconductor: Hagaaji nadaafadda maraqyada, si loo wanaajiyo wax-soo-saarka chips-yada semiconductor.
Hot Tags: Quartz Wafer Nadiifinta Doonta, China Quartz Wafer Nadiifinta Doonyaha Soosaarayaasha, alaab-qeybiyeyaasha, Warshada
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